Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605230 | Solutions and processes for removal of sidewall residue after dry etching | Tien-Sheng Chao, Tan-Fu Lei | 2003-08-12 |
| 6551972 | Solutions for cleaning silicon semiconductors or silicon oxides | Tan-Fu Lei, Tien-Sheng Chao | 2003-04-22 |