Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605955 | Temperature controlled wafer chuck system with low thermal resistance | Simon Costello | 2003-08-12 |
| 6583638 | Temperature-controlled semiconductor wafer chuck system | Simon Costello | 2003-06-24 |