Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647665 | Door systems for low contamination, high throughput handling of workpieces for vacuum processing | Farzad Tabrizi, Barry Kitazumi, David A. Barker, David Setton, Michael Kuhlman | 2003-11-18 |
| 6568552 | Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing | Farzad Tabrizi, Barry Kitazumi, David A. Barker, David Setton, Michael Kuhlman | 2003-05-27 |