Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624082 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Rene George, Robert Guerra, Allan B. Wiesnoski +2 more | 2003-09-23 |
| 6536449 | Downstream surface cleaning process | Wolfgang Helle, Robert Guerra, Brady Cole | 2003-03-25 |