Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565304 | Wafer boat elevator system and method | Arthur W. Harrison, Allen D. Edwards | 2003-05-20 |
| 6537010 | Wafer boat support and method for twin tower wafer boat loader | Arthur W. Harrison, Allen D. Edwards | 2003-03-25 |