Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627096 | Single mask technique for making positive and negative micromachined features on a substrate | David W. Sherrer, Gregory A. Ten Eyck, Dan Steinberg | 2003-09-30 |
| 6613243 | Method of making a 3-D structure using an erodable mask formed from a film having a composition that varies in its direction of thickness | — | 2003-09-02 |