Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593182 | Method for forming multiple gate oxide layer with the plasma oxygen doping | — | 2003-07-15 |
| 6541350 | Method for fabricating shallow trench isolation | — | 2003-04-01 |
| 6531367 | Method for forming ultra-shallow junction by boron plasma doping | — | 2003-03-11 |
| 6528434 | Method of forming a silicon oxide layer using pulsed nitrogen plasma implantation | — | 2003-03-04 |