Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660458 | Method of optical proximity correction | — | 2003-12-09 |
| 6627388 | Method for reducing roughness of photoresist through cross-linking reaction of deposit and photoresist | Chi-Fang Hsieh | 2003-09-30 |
| 6576407 | Method of improving astigmatism of a photoresist layer | Wei-Hua Hsu | 2003-06-10 |
| 6563127 | Optical proximity correction with rectangular contact | Tsung-Hsien Wu | 2003-05-13 |