Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565705 | Wafer carrier used for chemical mechanic polishing | Yung-Tai Hung | 2003-05-20 |
| 6559490 | Method of processing dielectric layer in ferroelectric RAM and structure of the like | — | 2003-05-06 |
| 6521922 | Passivation film on a semiconductor wafer | Wan-Yi Liu | 2003-02-18 |
| 6514821 | Method for planarizing dielectric layer of flash memory | — | 2003-02-04 |
| 6509249 | Method of fabricating shallow trench isolation | Yuhturng Liu | 2003-01-21 |
| 6503832 | Application of controlling gas valves to reduce particles from CVD process | Hung-Wei Liu, Chung-Yeh Lee, Chien-Chia Lin | 2003-01-07 |