Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630411 | Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber | Robert D. Broyles | 2003-10-07 |
| 6627466 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | George E. Bailey, Rennie Barber | 2003-09-30 |
| 6575907 | Determination of fetal weight in utero | Ziv Soferman | 2003-06-10 |