Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648974 | Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction | Vincenzo Ogliari, Vittorio Pozzetti | 2003-11-18 |
| 6579361 | Chemical vapor deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof | — | 2003-06-17 |