Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642123 | Method of fabricating a silicon wafer including steps of different temperature ramp-up rates and cool-down rates | Young Hee Mun, Gun Kim | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642123 | Method of fabricating a silicon wafer including steps of different temperature ramp-up rates and cool-down rates | Young Hee Mun, Gun Kim | 2003-11-04 |