Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637443 | Semiconductor wafer cleaning apparatus and method | Yun Jun Huh, Jae-Jeong Kim | 2003-10-28 |
| 6532976 | Semiconductor wafer cleaning apparatus | Yun Jun Huh, Jae-Jeong Kim | 2003-03-18 |