Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628183 | Micro-electro mechanical system having single anchor | Jin-woo Cho | 2003-09-30 |
| 6559487 | High-vacuum packaged microgyroscope and method for manufacturing the same | Youn-il Ko, Ho-Suk Kim | 2003-05-06 |
| 6528344 | Chip scale surface-mountable packaging method for electronic and MEMS devices | — | 2003-03-04 |