Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623606 | Method and apparatus for sputter coating with variable target to substrate spacing | Israel A. Wagner | 2003-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623606 | Method and apparatus for sputter coating with variable target to substrate spacing | Israel A. Wagner | 2003-09-23 |