SA

Sundar Amartur

Lam Research: 2 patents #39 of 202Top 20%
📍 Fremont, CA: #132 of 770 inventorsTop 20%
🗺 California: #4,287 of 28,521 inventorsTop 20%
Overall (2003): #41,670 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6669539 System for in-situ monitoring of removal rate/thickness of top layer during planarization — 2003-12-30
6664557 In-situ detection of thin-metal interface using optical interference — 2003-12-16