Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637446 | Integrated substrate processing system | David T. Frost, Mike Wallis | 2003-10-28 |
| 6625835 | Disk cascade scrubber | David T. Frost, Scott Petersen, Donald E. Stephens, Anthony Samuel Jones, III, Bryan Riley | 2003-09-30 |
| 6615510 | Wafer drying apparatus and method | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2003-09-09 |
| 6616509 | Method for performing two wafer preparation operations on vertically oriented semiconductor wafer in single enclosure | David T. Frost | 2003-09-09 |
| 6588043 | Wafer cascade scrubber | David T. Frost, Scott Petersen, Donald E. Stephens, Anthony Samuel Jones, III, Bryan Riley | 2003-07-08 |