Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620520 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Robert O'Donnell, Christopher C. Chang | 2003-09-16 |
| 6613442 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, Christopher C. Chang | 2003-09-02 |
| 6537429 | Diamond coatings on reactor wall and method of manufacturing thereof | Robert O'Donnell, Christopher C. Chang | 2003-03-25 |
| 6533910 | Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, Christopher C. Chang | 2003-03-18 |