Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653734 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, Christine Janowiak, John Lang | 2003-11-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653734 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, Christine Janowiak, John Lang | 2003-11-25 |