Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638839 | Hot-filament chemical vapor deposition chamber and process with multiple gas inlets | Xunming Deng | 2003-10-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638839 | Hot-filament chemical vapor deposition chamber and process with multiple gas inlets | Xunming Deng | 2003-10-28 |