Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38097 | Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports | David Trussell, Felix Kozakevich | 2003-04-29 |
CK
C. Robert Koemtzopoulos
Overall (2003): #253,352 of 273,478Top 95%
1
Patents 2003