Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643115 | Electrostatic chuck | Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Masaki Terazono, Yasushi Migita +2 more | 2003-11-04 |
JO
Junji Ohe
Overall (2003): #187,158 of 273,478Top 70%
1
Patents 2003