Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657442 | Micromechanical alternating and direct voltage reference apparatus | Heikki Seppä, Mika Suhonen | 2003-12-02 |
| 6630657 | Method and system for electrically controlling the spacing between micromechanical electrodes | Heikki Seppä | 2003-10-07 |
| 6513388 | Micromechanical precision silicon scale | Heikki Seppä, Teuvo Sillanp{umlaut over (aa)} | 2003-02-04 |