Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503365 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Gyu-chan Jeoung, Gyu-hwan Kwag | 2003-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503365 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Gyu-chan Jeoung, Gyu-hwan Kwag | 2003-01-07 |