Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620394 | Emission control for perfluorocompound gases by microwave plasma torch | Han S. Uhm, Ho Jun KANG | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620394 | Emission control for perfluorocompound gases by microwave plasma torch | Han S. Uhm, Ho Jun KANG | 2003-09-16 |