Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662462 | Precision measuring apparatus provided with a metrology frame with a thermal shield consisting of at least two layers | — | 2003-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662462 | Precision measuring apparatus provided with a metrology frame with a thermal shield consisting of at least two layers | — | 2003-12-16 |