Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544694 | Method of manufacturing a device by means of a mask phase-shifting mask for use in said method | Casparus Anthonius Henricus Juffermans | 2003-04-08 |
PD
Peter Dirksen
Overall (2003): #142,975 of 273,478Top 55%
1
Patents 2003