Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593154 | Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers | Yasuhiro Marume, Toshiyuki Watanabe, Takamasa Inobe, Yasuhiro Sato | 2003-07-15 |
| 6529792 | Process equipment selecting system and method for selecting process equipment | Yasuhiro Sato, Takamasa Inobe, Katsuya Ota, Yasuhiro Marume, Ryuji Takechi +2 more | 2003-03-04 |