Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646281 | Differential detector coupled with defocus for improved phase defect sensitivity | Matthias C. Krantz, Donald Pettibone, Stan Stokowski | 2003-11-11 |
| 6636301 | Multiple beam inspection apparatus and method | Robert W. Walsh | 2003-10-21 |
| 6584218 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Marek Zywno, Michael E. Fein | 2003-06-24 |