Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593180 | Method of manufacturing semiconductor device | Jun Lin | 2003-07-15 |
| 6586794 | Semiconductor device and its manufacture | Shunji Nakamura, Akiyoshi Hatada | 2003-07-01 |
| 6563157 | Semiconductor device having rigid capacitor structure with a liner film | — | 2003-05-13 |
| 6548844 | Capacitor having a structure capable of restraining deterioration of dielectric film, semiconductor device having the capacitor and method of manufacturing the same | Yusuke Kohyama | 2003-04-15 |
| 6541864 | Semiconductor device with tapered contact hole and wire groove | — | 2003-04-01 |