Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576562 | Manufacturing method of semiconductor device using mask pattern having high etching resistance | Junko Ohuchi, Yasuhiko Sato, Eishi Shiobara, Hisataka Hayashi, Tokuhisa Ohiwa | 2003-06-10 |
| 6569595 | Method of forming a pattern | Yasuhiko Sato, Eishi Shiobara, Shuji Hayase, Yoshihiko Nakano | 2003-05-27 |