Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671861 | Manufacturing process evaluation method for semiconductor device and pattern shape evaluation apparatus using the evaluation method | — | 2003-12-30 |
| 6657735 | Method of evaluating critical locations on a semiconductor apparatus pattern | Tatsuo Akiyama | 2003-12-02 |
| 6583870 | Simulated defective wafer and pattern defect inspection recipe preparing method | — | 2003-06-24 |