Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621082 | Automatic focusing system for scanning electron microscope equipped with laser defect detection function | Mitsuyoshi Sato, Atsushi Uemoto | 2003-09-16 |
| 6504164 | Electron beam apparatus | Akira Yonezawa, Mitsuyoshi Satou | 2003-01-07 |