Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630991 | Thermal processing apparatus | Eisuke Morisaki, Yun Mo | 2003-10-07 |
| 6566630 | Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object | — | 2003-05-20 |