Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660455 | Pattern formation material, pattern formation method, and exposure mask fabrication method | Takehiro Kondoh | 2003-12-09 |
| 6649310 | Method of manufacturing photomask | Shigeki Nojima, Shoji Mimotogi, Osamu Ikenaga | 2003-11-18 |
| 6550990 | Substrate processing apparatus and processing method by use of the apparatus | Hideaki Sakurai, Shinichi Ito | 2003-04-22 |
| 6537844 | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2003-03-25 |