Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664592 | Semiconductor device with groove type channel structure | Seiji Inumiya, Tomohiro Saito, Atsushi Yagishita, Toshihiko Iinuma | 2003-12-16 |
| 6611017 | Semiconductor device provided with capacitor having cavity-provided electrode | — | 2003-08-26 |
| 6600166 | Scanning exposure method | Takashi Sato | 2003-07-29 |
| 6541813 | Capacitor and method for manufacturing the same | Shoko Niwa, Hiroshi Tomita, Kazuhiro Eguchi | 2003-04-01 |
| 6515338 | Semiconductor device and manufacturing method therefor | Seiji Inumiya, Tomohiro Saito, Atsushi Yagishita, Toshihiko Iinuma | 2003-02-04 |