Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627356 | Photomask used in manufacturing of semiconductor device, photomask blank, and method of applying light exposure to semiconductor wafer by using said photomask | Hiroshi Nomura | 2003-09-30 |
| 6558853 | Method for manufacturing exposure mask, exposure apparatus and semiconductor device | — | 2003-05-06 |