Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521046 | Chamber material made of Al alloy and heater block | Toshiyuki Tanaka, Koji Wada, Hiroki Sawada, Hiroshi Matsuura | 2003-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521046 | Chamber material made of Al alloy and heater block | Toshiyuki Tanaka, Koji Wada, Hiroki Sawada, Hiroshi Matsuura | 2003-02-18 |