Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599846 | Method of forming a silica-containing coating film with a low dielectric constant and semiconductor substrate coated with such a film | Michio Komatsu, Akira Nakashima, Miki Egami | 2003-07-29 |