Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667245 | CMOS-compatible MEM switches and method of making | Lap-Wai Chow, Tsung-Yuan Hsu, Robert Y. Loo, Paul Ouyang, James H. Schaffner +2 more | 2003-12-23 |
| 6504118 | Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism | Mark Hyman, Peter Bogdanoff | 2003-01-07 |