Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6520726 | Apparatus and method for using a robot to remove a substrate carrier door | Craig Chidlow, Rodney C. Ow, Lang Van Nugyen, J. Rafael Gomez, Steve Reyling +2 more | 2003-02-18 |