Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521047 | Process and apparatus for liquid delivery into a chemical vapor deposition chamber | Benoit Pierret, Herve Guillon | 2003-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521047 | Process and apparatus for liquid delivery into a chemical vapor deposition chamber | Benoit Pierret, Herve Guillon | 2003-02-18 |