Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6590267 | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods | Scott H. Goodwin-Johansson | 2003-07-08 |
| 6586738 | Electromagnetic radiation detectors having a micromachined electrostatic chopper device | David Dausch | 2003-07-01 |