Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583057 | Method of forming a semiconductor device having a layer deposited by varying flow of reactants | Ramachandran Muralidhar | 2003-06-24 |
| 6573160 | Method of recrystallizing an amorphous region of a semiconductor | William J. Taylor, Jr., Marius Orlowski, David C. Gilmer, Christopher C. Hobbs, Michael Rendon +1 more | 2003-06-03 |
| 6528377 | Semiconductor substrate and method for preparing the same | Theodoros Mihopoulos, J. Vernon Cole | 2003-03-04 |
| 6524967 | Method for incorporating nitrogen into a dielectric layer using a special precursor | — | 2003-02-25 |
| 6518070 | Process of forming a semiconductor device and a semiconductor device | Mark V. Raymond, Sucharita Madhukar, Roland R. Stumpf, Chun-Li Liu, Clarence J. Tracy | 2003-02-11 |