Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6567155 | Method for improved resolution of patterning using binary masks with pupil filters | Manish Chandhok | 2003-05-20 |
| 6549272 | Method for improved resolution of patterning using binary masks with pupil filters | Manish Chandhok | 2003-04-15 |