Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645877 | Method of operating a processing chamber having multiple stations | Jennifer O'Loughlin | 2003-11-11 |
| 6518184 | Enhancement of an interconnect | Stephen Chambers, Valery M. Dubin, Christine Hau-Riege | 2003-02-11 |