Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593749 | Wafer level method for probing micromechanical devices | Patrick Edward Feierabend, Michael Shillinger | 2003-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593749 | Wafer level method for probing micromechanical devices | Patrick Edward Feierabend, Michael Shillinger | 2003-07-15 |