Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596625 | Method and device for producing a metal/metal contact in a multilayer metallization of an integrated circuit | Martin Schneegans | 2003-07-22 |
| 6583020 | Method for fabricating a trench isolation for electrically active components | Ines Uhlig, Jens Zimmermann | 2003-06-24 |
| 6541372 | Method for manufacturing a conductor structure for an integrated circuit | Peter Moll | 2003-04-01 |
| 6511918 | Method of structuring a metal-containing layer | Kerstin Krahl | 2003-01-28 |