Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541833 | Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component | Wolfgang Werner | 2003-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541833 | Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component | Wolfgang Werner | 2003-04-01 |