Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645850 | Semiconductor device having cavities with submicrometer dimensions generated by a swelling process | Rainer Leuschner | 2003-11-11 |
EM
Egon Mergenthaler
Overall (2003): #231,680 of 273,478Top 85%
1
Patents 2003